Product Safety

Electrical Design, Interlocks, & Emergency Shutdown
Requirements associated with the design of electrical components and electrical/electronic safety controls on semiconductor process equipment.

Fire Protection
Requirements associated with the design of semiconductor process equipment regarding the prevention of fire or explosion, as well as the requirements associated with fire detection and suppression.

Ergonomics / Human Factors
Requirements associated with the design of semiconductor process equipment regarding man-machine interface and human factors.

Hazardous Energy Control
Requirements associated with the control of hazardous energies (e.g., electrical, mechanical, thermal, pressure, chemical, electromagnetic, etc.) in the design of semiconductor process equipment.

Mechanical Design & Seismic Protection
Requirements associated with the control of design and installation of semiconductor process equipment with respect to seismic design.

Automated Material Handlers / Robotics
Requirements associated with the use of automated systems and robotics integrated in the semiconductor process equipment.

Resource Conservation & Solid Waste Management
Requirements associated with the conservation of water, power, and other resources regarding machinery used in semiconductor processing. In addition addresses activities that result in the generation of solid (non-hazardous) wastes such as packaging and materials used in maintenance/repair of semiconductor manufacturing equipment.

Chemical Safety
Requirements associated with the following chemical safety/industrial hygiene issues: general chemical safety design, chemical detection, and exhaust ventilation. This section doesn't include chemical restrictions or exposure limits (these are covered under Product Safety & Stewardship: Restriction of Hazardous Substances) nor requirements for individuals using/exposed to chemicals (these are covered under Operational ESH Issues: Chemical Safety & Hazard Communication).

Ionizing & Non-ionizing Radiation, Lasers & Noise
Requirements associated with industrial hygiene issues regarding electromagnetic radiation exposures and controls for semiconductor process equipment.

Warning Labels
Will cover the requirements associated with the design and placement of hazard warning labels on semiconductor process equipment.

Product Stewardship

Batteries
Requirements specific to battery requirements including: restricted substances, labeling, and take-back.

DfE Product Stewardship
Requirements relating to regulatory requirements that require environmental impacts be considered from the design of the products such as the Electric Using Products Proposal in Europe.

Packaging
Labeling and take-back requirements for packaging used to ship products.

Product Takeback / Recycling
Legislative requirements for the collection and recycling of products such as the European WEEE Directive.

Restricted substances
Provides a searchable relational database covering hazardous substances that may be used in the manufacturing of semiconductor process equipment, or are used in semiconductor equipment during end-use and maintenance. For materials which will have restrictions on use, a detailed report will be provided. For other materials the database will provide information about exposure and discharge limits.

Transboundary Waste Controls
Covers international agreements (e.g., Basel Convention) and requirements regarding the shipment of waste between international boundaries.

Operational ESH Issues

Occupational Health & Safety Overview
General OHS requirements associated with in a semiconductor processing facility. This will include injury/illness prevention programs, injury/illness reporting and recordkeeping, OSHAS, risk assessment of operations, etc.

General Facility Design & Construction
An overview of requirements for general facility design and construction, and work space requirements for semiconductor facilities. [Note: this will not go into the level of detail needed to comply with all local building- or fire-related codes.]

Life Safety & Emergency Response
Requirements associated with life safety and emergency response issues (including alarms and plans) that are applicable to persons working with or near semiconductor process equipment. Included in this will be access, work space, and work area requirements, evacuation, aisles, confined spaces, etc.

Chemical Safety & Hazard Communication
Requirements associated chemical use regulations and the information required to be communicated to workers and contractors in semiconductor process areas. Note: chemical restrictions and occupational limits are addressed in Product Safety & Stewardship: Restrictions of Hazardous Substances.

Ergonomics
Requirements for ergonomics and material handling within semiconductor operations

Environmental Impacts
ISO14001 requirements that may be applicable in jurisdictions such as EMAS in Europe.

Hazardous Wastes
General requirements associated with the generation, collection, and disposal of hazardous wastes from semiconductor equipment operation and maintenance.

SEMITRACK specific

Physical Safety
Requirements for the following subtopics:

• Hand and portable power tools
• Machine guarding
• Work from elevated heights (including fall protection, ladders, elevated work platforms, etc.)
• Welding and cutting operations
• Hoists and lifts
• Powered industrial trucks

[Note: information on ionizing and non-ionizing radiation and noise exposures will be covered under Product Safety & Stewardship: Ionizing & Non-ionizing Radiation, Lasers & Noise.][Note: information on ionizing and non-ionizing radiation and noise exposures will be covered under Product Safety & Stewardship: Ionizing & Non-ionizing Radiation, Lasers & Noise.]

ESH Training
ESH training requirements applicable to personnel working in semiconductor manufacturing facilities

Equipment Decontamination and Hazardous Materials Transportation
Requirements associated with the decontamination and shipment of equipment, components and materials that are shipped from semiconductor manufacturing facilities.

Environmental Discharges
Requirements associated with activities that result in discharge of contaminants to air, water or soil from semiconductor manufacturing facilities.